Explanation/Annotation:Piezoresistive inertial microsystem for determination of low accelerations .
Detailed model description:Range of applicability: in different branches of industry, aviation and in transport.
technical characteristics:
range of accelerations measurement, g. 2-10
crystal dimensions of microsystem, MM. 8, 0x2, 5x0, 44
weight of siliceous inertial mass, mg. 2
typical sizes of siliceous beams, micrometres. 600x20x10
sensibility in case of supply voltage 9 in, ìÂ/g. 1, 9
resonance frequency of microsystem, Hz. 1200
block of frequencies, Hz. From 0 to 400 |
